2009-11-27 11:21:32CAstro
在初抽(roughing)系統中,常以roots pump串接另一 rotary pump的設計目的
Root’s pump 為一種高抽氣速率, 但壓縮比較低, 無法將 chamber 抽至較佳的底壓. Rotary pump 可提供較高的壓縮比, 可使 chamber 可抽至較佳的真空範圍. 兩者串連可提供高抽氣速率與高壓縮比的特性.
System Structure
Root’s pump 為一種高抽氣速率, 但壓縮比較低, 無法將 chamber 抽至較佳的底壓. Rotary pump 可提供較高的壓縮比, 可使 chamber 可抽至較佳的真空範圍. 兩者串連可提供高抽氣速率與高壓縮比的特性.
System Structure
This was quite an informative post and I actually got to know a lot about rotary pumps. This post had no content about jack screw flange and I wanted to know about it. I guess I'll have to visit another site to know about it.